Fabrication of micro tactile sensor for the measurement of micro-scale local elasticity
Fabrication of micro tactile sensor for the measurement of micro-scale local elasticity
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DOI：
10.1016/j.sna.2003.10.003
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发表时间：
2004-01-01
影响因子：
4.6
通讯作者：
Omata, S
中科院分区：
文献类型：
--
作者：
Murayama, Y;Omata, S
近年来，原子力显微镜（AFM）已成功地应用于局部弹性测量，特别是在生物领域。然而，不可避免地使用悬臂导致测量和样品制备的困难。此外，AFM系统的高成本阻碍了其广泛的工业和临床应用。在本文中，局部弹性的特性进行评估的一种新型的微触觉传感器（NITS）开发的廉价和简单的技术。NITS技术基于简单的超声波接触传感，其高灵敏度适合于微尺度测量。该传感器由一个压电换能器和一个针形的10-妈妈换能点与玻璃针。通过采用一种新的相移方法，实现了高稳定性和高分辨率。物体的杨氏模量可以通过分析系统的共振频率的变化而导出。使用具有不同程度的杨氏模量的有机硅样品，计算NITS的校准方程。结果表明，这种新的NITS技术，可以在不使用传统的悬臂梁探针的情况下进行微尺度的局部弹性测量。(C)2003 Elsevier B. V.保留所有权利。
In the recent past, atomic force microscopy (AFM) has been successfully applied to local elasticity measurement especially in biological fields. However, inevitable use of a cantilever results in difficulties in measurements and in sample preparation. Furthermore, the high cost of AFM systems prevents their widespread industrial and clinical use. In this paper, characteristics of local elasticity are evaluated by a new type of micro tactile sensor (NITS) developed with inexpensive and simple technology. NITS technology is based on simple ultrasonic contact sensing, and its high sensitivity is appropriate for micro-scale measurement. The sensor consists of a piezoelectric transducer and a needle-shaped 10-mum transduction point made with a glass needle. High stability and resolution are accomplished by applying a novel phase shift method. Young's modulus of objects can be derived by analyzing the change in resonance frequency of the system. Using silicone samples with different degrees of Young's modulus, a calibration equation for the NITS was calculated. Results show that with this novel NITS technology, micro-scale local elasticity measurement can be made without using conventional cantilever probes. (C) 2003 Elsevier B.V. All rights reserved.