Metrological properties of an ionization gauge with carbon nanotube cathode in different gases
Metrological properties of an ionization gauge with carbon nanotube cathode in different gases
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碳纳米管阴极电离计在不同气体中的计量特性
DOI：
10.1016/j.vacuum.2016.01.002
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发表时间：
2016-03-01
期刊：
影响因子：
4
通讯作者：
Dong, Changkun
中科院分区：
文献类型：
--
作者：
Li, Detian;Cheng, Yongjun;Dong, Changkun
本文研制了一种新型的碳纳米管阴极电离规，并系统地研究了它在不同气体中的真空特性。在10（-8）~ 10（-4）Pa范围内，N_2、H_2、O_2和空气中的归一化离子流与气体压强的测量均具有良好的线性关系，而He的线性响应范围仅为10（-7）~ 10（-4）Pa。该压力计在O-2气体中的最低可测量压力约为1 x 10（-8）Pa，这比报道的具有CNT阴极的相同压力计类型低一个数量级。实验还发现，规管灵敏度与气体种类和阳极电压密切相关，在阳极电压为300 V时，N-2的灵敏度因子高达0.205 Pa-1，这是首次报道的灵敏度高于母体热阴极规管的CNT-阴极电离规管。(C)2016爱思唯尔有限公司版权所有
A novel CNT-cathode ionization gauge was developed in this work, and its vacuum metrological characteristics in different gases were studied systematically. A good measurement linearity between normalized ion current and gas pressure is achieved from 10(-8) to 10(-4) Pa in N-2, H-2, O-2 and air, respectively, and the linear response region for He only lies in the range from 10(-7) to 10(-4) Pa. The lowest measureable pressure with this gauge is about 1 x 10(-8) Pa in O-2 gas, which is one order of magnitude lower than the reported same gauge type with CNTs cathode. It is also found that the gauge sensitivities are closely dependent upon gas species and anode voltage, and a high sensitivity factor as high as 0.205 Pa-1 is acquired for N-2 under an anode voltage of 300 V, which is the first reported CNT-cathode ionization gauge whose sensitivity is higher than the parent hot cathode one. (C) 2016 Elsevier Ltd. All rights reserved.