Fabrication of NbN single flux quantum (SFQ) circuit and operating properties at 10 K
Fabrication of NbN single flux quantum (SFQ) circuit and operating properties at 10 K
复制标题
NbN 单通量量子 (SFQ) 电路的制造和 10 K 下的工作特性
DOI：
10.1002/ecjb.1063
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发表时间：
2001
期刊：
影响因子：
--
通讯作者：
Zhen Wang
中科院分区：
文献类型：
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作者：
H. Terai;Zhen Wang
我们用临界温度约为16 K的NbN制作了一个工作在10 K附近的单通量量子逻辑电路原型。该电路基于NbN/AlN/NbN隧道结在2英寸的硅（Si）衬底上制造，该隧道结具有来自976个约瑟夫森结（JJ）的±5%或更小的临界电流波动。制造用于产生、传播和检测SFQ脉冲的原型电路，并对其操作进行检查，确认在高达约9.8K（接近10 K）的温度下正常操作。此外，在8.5K的操作温度下，验证了诸如汇流缓冲器和T触发器的基本单元的操作，并且在最大规模电路（由105 JJ组成的8位移位寄存器）的操作中是成功的。© 2001 Scripta Technica，Electron Comm Jpn Pt 2，84（10）：34-39，2001
We fabricated a prototype of a single flux quantum (SFQ) logic circuit for operation near 10 K by using NbN, which has a critical temperature around 16 K. This circuit is fabricated on a 2-inch silicon (Si) substrate based on the NbN/AlN/NbN tunnel junction having fluctuations in the critical current of ±5% or less from 976 Josephson junctions (JJ). The fabrication of a prototype circuit to generate, propagate, and detect SFQ pulses and the examination of its operation confirmed normal operation up to approximately 9.8 K, which is close to 10 K. In addition, at the operating temperature of 8.5 K, the operations of elementary cells such as a confluence buffer and a T flip-flop were verified and were successful in the operation of the largest scale circuit, an 8-bit shift register consisting of 105 JJ. © 2001 Scripta Technica, Electron Comm Jpn Pt 2, 84(10): 34–39, 2001