Interaction between hydrogen plasma and hydrogenated amorphous carbon film, investigated by infrared spectroscopy
Interaction between hydrogen plasma and hydrogenated amorphous carbon film, investigated by infrared spectroscopy
复制标题
DOI：
10.1016/j.tsf.2007.10.014
复制
发表时间：
2008-05
期刊：
影响因子：
2.1
通讯作者：
M. Shinohara;Ken Cho;H. Shibata;K. Okamoto;T. Nakatani;Y. Matsuda;H. Fujiyama
中科院分区：
文献类型：
--
作者：
M. Shinohara;Ken Cho;H. Shibata;K. Okamoto;T. Nakatani;Y. Matsuda;H. Fujiyama
