Multilayer coated grazing incidence condenser for large numerical aperture objective at wavelength of 4.5 nm
Multilayer coated grazing incidence condenser for large numerical aperture objective at wavelength of 4.5 nm
复制标题
多层镀膜掠入射聚光镜，适用于波长 4.5 nm 的大数值孔径物镜
作者：
T. Ejima;T. Hatano;K. Ohno;T. Fukayama;S. Aihara;M. Yanagihara;and T. Tsuru
