Recent developments in X-ray imaging with micrometer spatial resolution
Recent developments in X-ray imaging with micrometer spatial resolution
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DOI：
10.1107/s0909049506000550
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发表时间：
2006-03-01
影响因子：
2.5
通讯作者：
Koch, A
中科院分区：
文献类型：
--
作者：
Martin, T;Koch, A
自1996年以来，在同步辐射源上开发了用于空间分辨率在微米和亚微米范围内成像的x射线探测器。探测器由闪烁体、光学显微镜和电荷耦合器件（CCD）组成。闪烁体将被材料阻挡的部分x射线转换成可见光图像，通过光学器件投射到CCD上。利用1 μ m厚的掺铕Lu3Al5O12薄膜，实现了0.5 μ m的FWHM分辨率。探测器的探测量子效率主要受限于闪烁体薄层对x射线的低吸收。为了增加吸收，从而减少曝光时间，研究了新的闪烁体（Lu2O3: Eu3+, Gd2O3: Eu3+, Lu2SiO5: Ce, Gd3Ga5O12: Eu3+, CdWO4）。它们是用溶胶-凝胶和液相外延工艺制备的。最后，给出了第一个包含光学辐射硬度的快速显微层析成像实验。该探测器使用具有60 keV有效能量的高强度白光束和高达60帧每秒（-1）的快速CCD相机。
X-ray detectors for imaging with a spatial resolution in the micrometer and submicrometer range have been developed at synchrotron radiation sources since 1996. The detectors consist of a scintillator, a light microscopy optic and a charge-coupled device ( CCD). The scintillator converts part of the X-ray stopped by a material into a visible-light image which is projected onto the CCD by the light optics. A resolution of 0.5 mu m FWHM has been achieved using a 1 mu m-thick europium-doped Lu3Al5O12 film. The detective quantum efficiency of the detector is mainly limited by the low absorption of X-rays in the thin layer of the scintillator. To increase the absorption, and therefore reduce the exposure time, new scintillators ( Lu2O3: Eu3+, Gd2O3: Eu3+, Lu2SiO5: Ce, Gd3Ga5O12: Eu3+, CdWO4) have been investigated. These were fabricated using sol-gel and liquid-phase epitaxy processes. Finally, the first fast microtomography experiment including radiation hardness of the optic is shown. This detector uses a high-intensity white beam with 60 keV effective energy and a fast CCD camera at up to 60 frames s(-1).