Fabrication and properties of ceramic coatings for CTR liquid blanket by sputtering method
Fabrication and properties of ceramic coatings for CTR liquid blanket by sputtering method
复制标题
溅射法CTR液毯陶瓷涂层的制备及性能
DOI：
10.1016/s0920-3796(00)00465-8
复制
发表时间：
2000
影响因子：
1.7
通讯作者：
T. Yoneoka
中科院分区：
文献类型：
--
作者：
T. Terai;Takaaki Mitsuyama;T. Yoneoka
陶瓷涂层的研制是聚变堆液态金属包层研制的重要课题之一。Al_2O_3和AlN由于其高电阻率和高热力学稳定性而成为陶瓷涂层的候选材料。采用射频溅射法制备了Al2O3和AlN薄膜，并对其性能进行了研究。所制备的Al2O3涂层为非晶态，无多孔结构，具有较高的电阻率。另一方面，所制备的AlN涂层的电阻根据工作气体的组成在10个数量级的范围内变化。这可能是由于产品中氮缺乏造成的。
Development of ceramic coating is one of the most important subjects in fusion-reactor liquid-metal blanket R&D. Al2O3and AlN are candidate materials for ceramic coatings because of their high electrical resistivity and high thermodynamic stability. In this study, Al2O3and AlN coatings were fabricated by the RF sputtering method and their properties were investigated. The prepared Al2O3coating was amorphous, and it had high electrical resistance with no porous structure. On the other hand, the resistance of the prepared AlN coating changed in the range of 10 orders of magnitude depending on the composition of the working gas. This is presumably derived from the nitrogen deficiency in the product.