Well-Ordered Self-Assembled Nanostructures of Block Copolymer Films via Synergistic Integration of Chemoepitaxy and Zone Annealing
Well-Ordered Self-Assembled Nanostructures of Block Copolymer Films via Synergistic Integration of Chemoepitaxy and Zone Annealing
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通过化学外延和区域退火的协同集成嵌段共聚物薄膜的有序自组装纳米结构
DOI：
10.1039/c7cp06261c
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发表时间：
2018
影响因子：
3.3
通讯作者：
Jiaping Lin
中科院分区：
文献类型：
--
作者：
Liangshun Zhang;Lingling Liu;Jiaping Lin
在有限的退火时间内制备宏观上有序的嵌段共聚物纳米结构是一项极具挑战性的任务。在这项工作中，我们提出了一种新的集成策略的化学外延和区域退火直接自组装片层形成嵌段共聚物。大规模的数值模拟证实，集成策略有能力通过化学模板的对准引导和区域退火的缺陷湮灭之间的协同作用，在宏观区域上产生良好对准和良好取向的laminate，即使化学模板的引导条纹非常稀疏。进一步证明了实现良好有序纳米结构的有效退火时间强烈依赖于引导条的节距和嵌段共聚物膜的厚度。该工作为通过集成策略提高化学外延的定向效率提供了一个有指导意义的实例，并为快速制备嵌段共聚物纳米光刻的有序纳米结构奠定了基础。
It is an extremely challenging task to fabricate macroscopically well-ordered nanostructures of block copolymers in a limited annealing time. In this work, we propose a novel integrated strategy of chemoepitaxy and zone annealing to direct the self-assembly of lamella-forming block copolymers. Large-scale numerical simulations corroborate that the integrated strategy has the capability to generate well-aligned and well-oriented lamellae over a macroscopic area via the synergy between the alignment guidance of the chemical template and the defect annihilation of zone annealing, even though the guiding stripes of the chemical template are extremely sparse. It is further demonstrated that the effective annealing time to achieve the well-ordered nanostructures is strongly dependent upon the pitch of guiding stripes and the thickness of block copolymer films. This work provides an instructive example for boosting the directing efficiency of chemoepitaxy through the integrated strategy, and lays the groundwork for rapidly fabricating well-ordered nanostructures of block copolymer nanolithography.