Fabrication of two-dimensional micro patterns for adaptive optics by using laser interference lithography
Fabrication of two-dimensional micro patterns for adaptive optics by using laser interference lithography
复制标题
使用激光干涉光刻制造自适应光学的二维微图案
DOI:
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发表时间:
2015
期刊:
影响因子:
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通讯作者:
So Ito and Wei Gao
中科院分区:
文献类型:
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作者:
Xinghui Li;Yindi Cai;Ryo Aihara;Yuki Shimizu;So Ito and Wei Gao