On-Chip Array of Thermoelectric Peltier Microcoolers
On-Chip Array of Thermoelectric Peltier Microcoolers
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片上热电帕尔贴微冷却器阵列
DOI：
10.1109/sensor.2007.4300599
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发表时间：
2007
期刊：
影响因子：
--
通讯作者：
J. Correia
中科院分区：
文献类型：
--
作者：
L. Gonçalves;J. G. Rocha;C. Couto;P. Alpuim;J. Correia
本文报道了第一个单像素独立控制的片上热电微致冷器阵列(像素排列成8×8阵列)的理论建模、有限元模拟、制作工艺和初步结果。该微冷却器阵列使用Bi2Te3和Sb2Te3共蒸发的V-VI化合物作为热电层，可以使用平面薄膜技术、光刻和在先前制造CMOS电子电路的硅片上进行湿法刻蚀来制造。
This article reports on the theoretical modelling, the finite element modelling (FEM) simulation, the fabrication process and preliminary results of the first on-chip thermoelectric microcooler array (64 pixels arranged in a 8times8 array), with each pixel independently controlled. This microcooler array uses co-evaporated V-VI compounds of Bi2Te3 and Sb2Te3 as thermoelectric layers, and can be fabricated using planar thin-film technology, lithography and wet etching on top of a silicon wafer, where the CMOS electronic circuits were previously made.