Nanochannel Array Glass
Nanochannel Array Glass
复制标题
DOI：
10.1126/science.258.5083.783
复制
发表时间：
1992-10
期刊：
影响因子：
56.9
通讯作者：
R. J. Tonucci;B. L. Justus;A. Campillo;C. E. Ford
中科院分区：
文献类型：
--
作者：
R. J. Tonucci;B. L. Justus;A. Campillo;C. E. Ford
描述了一种含有规则平行的亚微米通道或毛细管阵列的玻璃的制备和表征。毛细管排列成二维六边形紧密堆积结构，通道直径小至33纳米，堆积密度高达每平方厘米3×1010个通道。纳米通道玻璃阵列的高温稳定性非常适合作为形成量子受限半导体结构的主机或模板，或者作为大规模平行图案化光刻应用的掩模。
The fabrication and characterization of a glass containing a regular parallel array of submicrometer channels or capillaries are described. The capillaries are arranged in a two-dimensional hexagonal close packing configuration with channel diameters as small as 33 nanometers and packing densities as high as 3 x 1010 channels per square centimeter. The high-temperature stability of the nanochannel glass array is well suited as a host or template for the formation of quantum confined semiconductor structures or as a mask for massively parallel patterned lithographic applications.