Hybrid sputtering-remote PECVD deposition of Au nanoparticles on SiO2 layers for surface plasmon resonance-based colored coatings
Hybrid sputtering-remote PECVD deposition of Au nanoparticles on SiO2 layers for surface plasmon resonance-based colored coatings
复制标题
混合溅射-远程 PECVD 在 SiO2 层上沉积金纳米颗粒，用于基于表面等离子体共振的彩色涂层
DOI：
10.1002/ppap.201000003
复制
发表时间：
2010
影响因子：
3.5
通讯作者：
M. Creatore
中科院分区：
文献类型：
--
作者：
H. T. Beyene;F. Tichelaar;P. Peeters;I. Kolev;M. Sanden;M. Creatore
本文提出了一种由分散在介质层表面的金属纳米颗粒组成的混合系统：使用远程膨胀热等离子体CVD系统从六甲基二硅氧烷/氧混合物中沉积无机(即SiO_2)层，并结合射频磁控溅射工具在SiO_2层的顶部沉积金属(即金)纳米颗粒。用UVVIS-NIR变角椭圆偏振光谱仪研究了Au/SiO_2薄膜的光学性质。用卢瑟福背散射和透射电子显微镜分别测定了薄膜的密度、纳米粒子的尺寸和分布。由于纳米粒子尺寸的增大和金属表面覆盖率的增加，表面等离子体共振带向更高的波长移动，金纳米粒子在SiO_2层表面的均匀分布使得可以获得从红到蓝的涂层。(如图所示)
In this paper, a hybrid system consisting of metal nano-particles dispersed on the surface of a dielectric layer is presented: a remote Expanding Thermal Plasma CVD system is used for the deposition of the inorganic (i.e. SiO 2) layers from hexamethyldisiloxane/oxygen mixtures in combination with an rf magnetron sputtering tool for the deposition of metallic (i.e. gold) nanoparticles on top of the SiO2 layers. The optical properties of the Au/ SiO2 layers have been investigated by means of UVVIS-NIR variable angle spectroscopic ellipsometry. Rutherford backscattering and transmission electron microscopy were used to determine the film density, the nanoparticle size and its distribution, respectively. The uniform distribution of gold nanoparticles on the surface of the SiO2 layers allows obtaining redto blue- colored coatings as a consequence of the shift of the surface plasmon resonance band to higher wavelengths, caused by an increase in size of nanoparticles and metal surface coverage. (Figure Presented)