Epitaxial growth of Dy2O3 films on SrTiO3(001) substrates by molecular beam epitaxy

Epitaxial growth of Dy2O3 films on SrTiO3(001) substrates by molecular beam epitaxy
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DOI:
10.1116/1.3521482
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发表时间:
2011-01
影响因子:
1.4
通讯作者:
Md. Nurul Kabir Bhuiyan;Mariela Menghini;J. Locquet;J. Seo;C. Dieker;W. Jäger;C. Marchiori
Md. Nurul Kabir Bhuiyan;Mariela Menghini;J. Locquet;J. Seo;C. Dieker;W. Jäger;C. Marchiori
中科院分区:
工程技术4区
文献类型:
--
作者:
Md. Nurul Kabir Bhuiyan;Mariela Menghini;J. Locquet;J. Seo;C. Dieker;W. Jäger;C. Marchiori

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采用分子束外延技术在SrTiO3(001)衬底上生长了Dy(2)O(3)外延薄膜。用原位反射高能电子衍射仪(RHEED)、非原位X射线衍射仪(X射线衍射仪)、原子力显微镜和透射电子显微镜对Dy(2)O(3)薄膜的结构、形貌和界面性质进行了研究。RHEED谱和X射线衍射谱表明,Dy(2)O(3)薄膜是以(001)取向的立方相外延生长的。薄膜表面光滑,均方根粗糙度为4埃。透射电子显微镜图像显示,Dy(2)O(3)薄膜为晶态,薄膜与衬底之间有一个陡峭的界面,没有任何迹象表明界面上发生了化学反应或互扩散。(C)2011年美国真空协会。编号:10.1116/1.3521482
Epitaxial Dy(2)O(3) thin films are grown on SrTiO(3)(001) substrates by molecular beam epitaxy. Structural, morphological, and interfacial properties of the Dy(2)O(3) film are investigated by in situ reflection high-energy electron diffraction (RHEED), ex situ x-ray diffraction (XRD), atomic force microscopy, and cross-sectional transmission electron microscopy (TEM). RHEED patterns and XRD spectra show that the Dy(2)O(3) film is grown epitaxially in a cubic phase with a (001) orientation. The surface of the film is smooth with a rms roughness of 4 angstrom. The TEM image shows that the Dy(2)O(3) film is crystalline with an abrupt interface between the film and substrate without any indication of a chemical reaction or interdiffusion occurring at the interface. (C) 2011 American Vacuum Society. DOI: 10.1116/1.3521482