Nucleation site interaction between artificial cavities during nucleate pool boiling on silicon with integrated micro-heater and temperature micro-sensors
Nucleation site interaction between artificial cavities during nucleate pool boiling on silicon with integrated micro-heater and temperature micro-sensors
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DOI：
10.1016/j.ijheatmasstransfer.2012.02.014
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发表时间：
2012-05
影响因子：
5.2
通讯作者：
C. Hutter;K. Sefiane;T. Karayiannis;A. Walton;R. A. Nelson;D. Kenning
中科院分区：
文献类型：
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作者：
C. Hutter;K. Sefiane;T. Karayiannis;A. Walton;R. A. Nelson;D. Kenning
核态沸腾通常被描述为一个非常复杂和难以捉摸的过程。许多相关机制仍未得到充分理解，需要进行更详细的审议。本文研究了在380μm厚水平硅片上不同间距的微加工人工腔中气泡的生长。水平取向的沸腾表面由集成在硅测试部分后部的薄电阻加热器加热。温度测量使用16个集成的微型传感器位于沸腾表面，每个与位于其几何中心的人工腔。实验中采用了三种腔间距分别为1.5，1.2和0.84mm的实验装置，实验装置的公称口径为10μm，深度为80μm。为了进行池沸腾实验，将测试部分安装在具有光学通路的封闭不锈钢沸腾室内，并完全浸入脱气的氟化惰性FC-72中。利用高速成像技术研究了在0.5和1bar绝对压力下气泡的成核、生长和脱离过程。研究了随着壁面间距的增大，间距的减小对气泡成核频率、气泡脱离频率和气泡直径的影响。此外，水平气泡聚并的频率被确定。对测得的频率和气泡离开直径的影响区域进行了比较与最近发表的研究结果。
Nucleate boiling is commonly characterised as a very complex and elusive process. Many involved mechanisms are still not fully understood and more detailed consideration is needed. In this study, bubble growth from micro-fabricated artificial cavities with varied spacing on a horizontal 380μm thick silicon wafer was investigated. The horizontally oriented boiling surface was heated by a thin resistance heater integrated on the rear of the silicon test section. The temperature was measured using 16 integrated micro-sensors situated on the boiling surface, each with an artificial cavity located in its geometrical centre. Experiments with three different spacings 1.5, 1.2 and 0.84mm in between cavities with a nominal mouth diameter of 10μm and a depth of 80μm were undertaken. To conduct pool boiling experiments, the test section was mounted inside a closed stainless steel boiling chamber with optical access and completely immersed in degassed fluorinert FC-72. Bubble nucleation, growth and detachment at 0.5 and 1bar absolute pressure were investigated using high-speed imaging. The effect of decreasing inter-site distance on bubble nucleation frequency, bubble departure frequency and diameter with increasing wall superheat is presented. Furthermore, the frequency of horizontal bubble coalescence was determined. The regions of influence on the measured frequencies and bubble departure diameter were compared with recently published findings.