Contact-free experimental determination of the static flexural spring constant of cantilever sensors using a microfluidic force tool.
Contact-free experimental determination of the static flexural spring constant of cantilever sensors using a microfluidic force tool.
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DOI：
10.3762/bjnano.7.43
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发表时间：
2016
影响因子：
3.1
通讯作者：
Hähner G
中科院分区：
文献类型：
--
作者：
Parkin JD;Hähner G
微纳米悬臂在原子力显微镜(AFM)和微纳机电系统(MEMS和NEMS)中被用作传感元件。它们实现了纳米机械测量，对于纳米材料的表征是必不可少的，并构成了许多纳米级设备的组成部分。尽管文献中描述的许多方法可以用来确定微悬臂和纳米悬臂传感器的静态弯曲弹簧常数，但在校准过程中不需要传感器与表面接触的实验技术仍然是例外而不是规则。我们描述了一种使用微流体力工具产生精确力的非接触式方法，并演示了这种方法与热噪声频谱相结合，可以在很宽的弹簧常数值范围内(≈0.8-160N/m)为不同几何形状的悬臂式传感器提供静态弯曲弹簧常数。
Micro- and nanocantilevers are employed in atomic force microscopy (AFM) and in micro- and nanoelectromechanical systems (MEMS and NEMS) as sensing elements. They enable nanomechanical measurements, are essential for the characterization of nanomaterials, and form an integral part of many nanoscale devices. Despite the fact that numerous methods described in the literature can be applied to determine the static flexural spring constant of micro- and nanocantilever sensors, experimental techniques that do not require contact between the sensor and a surface at some point during the calibration process are still the exception rather than the rule. We describe a noncontact method using a microfluidic force tool that produces accurate forces and demonstrate that this, in combination with a thermal noise spectrum, can provide the static flexural spring constant for cantilever sensors of different geometric shapes over a wide range of spring constant values (≈0.8–160 N/m).