A Piezoelectric Micropump Using Resonance Drive with High Power Density.
A Piezoelectric Micropump Using Resonance Drive with High Power Density.
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采用高功率密度谐振驱动的压电微型泵。
DOI：
10.1299/kikaic.65.1071
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发表时间：
1999
期刊：
影响因子：
--
通讯作者：
Kazuhiro Yoshida
中科院分区：
文献类型：
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作者：
Jung;S. Yokota;Kazuhiro Yoshida
作为使用流体动力的管内移动式微型机械等实用微型机械的动力源，需要具有高功率密度的微型泵。本文提出并开发了一种采用谐振驱动的压电微型泵。它基本上由一个作为带有附加质量的柔性泵室的波纹管、一个用于振荡波纹管的压电致动器和两个悬臂式止回阀组成。首先，通过大型模型的制作和基本实验证实了所提出的微型泵的有效性。其次，制作了适合实际应用的尺寸为φ9x10 mm的微型泵。接下来，利用各种结构参数对压力相关流量的频率特性和负载特性进行实验研究，以进行优化设计。通过这些实验，实验获得了微泵稳定和高性能的最佳附加质量和阀门厚度。在驱动频率为2.0 kHz时，获得最大流量80 mm3/s、最大泵压0.32 MPa、最大功率8.7 mW。通过与传统微型泵最大功率密度的比较，证实了采用谐振驱动的压电微型泵的可行性。
As a power source for practical micromachines such as in-pipe mobile micromachines using fluid power, micropumps having high power density are required. In this paper, a piezoelectric micropump using resonance drive is proposed and developed. It basically consists of a bellows as a flexible pump chamber with an additional mass, a piezoelectric actuator for oscillating the bellows and cantilever type of two check valves. Firs fly, an effectiveness of the proposed micropump is confirmed through a fabrication of the large model and basic experiments. Secondly, a micropump with the size of φ9x10 mm for practical application is fabricated. Next, frequency characteristics and load characteristics of pressure-dependent flow rate are experimentally investigated with various structural parameters for optimal design. Through those experiments, the optimal amounts of additional mass and valve thickness are experimentally obtained for stable and high performance of the micropump. The maximum flow rate of 80 mm3/s, maximum pumping pressure of 0.32 MPa and maximum power of 8.7 mW are obtained at the driving frequency of 2.0 kHz. Also the feasibility of the piezoelectric micropump using resonance drive is confirmed through a comparison with conventional micropumps on maximum power density.