Permanent Damage Introduced by Single Particles Incident on Silicon Devices
Permanent Damage Introduced by Single Particles Incident on Silicon Devices
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DOI:
10.1109/tns.1983.4333165
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发表时间:
1983-12
影响因子:
1.8
通讯作者:
J. R. Srour;Z. Shanfield;R. Hartmann;S. Othmer;D. Newberry
中科院分区:
文献类型:
--
作者:
J. R. Srour;Z. Shanfield;R. Hartmann;S. Othmer;D. Newberry
Analytical and experimental studies of the effects of permanent damage introduced in silicon devices by single particles have been performed. Calculation of dark current increases produced by a single neutron or alpha particle incident on a device depletion region suggests that problems may be encountered in certain VLSI circuits, such as imaging arrays. Determinations of the energy and angular distributions of primary knock-on atoms in 14-MeV neutron-irradiated silicon are presented. These distributions are employed in a distributed cluster model in an attempt to account for measured resistance changes in irradiated pinch resistors.