Uncertainty analysis of slot die coater gap width measurement by using a shear mode micro-probing system
Uncertainty analysis of slot die coater gap width measurement by using a shear mode micro-probing system
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DOI：
10.1016/j.precisioneng.2015.09.016
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发表时间：
2016
影响因子：
3.6
通讯作者：
S. Ito;Yuan-Liu Chen;Y. Shimizu;Hirotaka Kikuchi;W. Gao;Takahashi Kazuhiko;Kanayama Toshihiko;K. Arakawa;Atsushi Hayashi
中科院分区：
文献类型：
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作者：
S. Ito;Yuan-Liu Chen;Y. Shimizu;Hirotaka Kikuchi;W. Gao;Takahashi Kazuhiko;Kanayama Toshihiko;K. Arakawa;Atsushi Hayashi
建立了一种剪切模微探测系统，用于测量一种标称间隙宽度为90 μm、长度为200 mm的精密槽式模具涂层机的间隙。采用音叉型石英晶体谐振器对标称针尖球直径为52.6 μm的玻璃微笔进行了平行于测量面方向的振荡。为了补偿测量表面水层等不确定度源的影响，建立了一套在线评定系统。所测间隙宽度的测量不确定度估计小于100 nm。
A shear mode micro-probing system was constructed for gap measurement of a precision slot die coater with a nominal gap width of 90 μm and a length of 200 mm. A glass micro-stylus with a nominal tip ball diameter of 52.6 μm was oscillated by a tuning fork quartz crystal resonator with its oscillation direction parallel to the measurement surfaces. An on-line qualification setup was established to compensate for the influences of the uncertainty sources, including the water layers on the measurement surfaces. The measurement uncertainty of the measured gap width was estimated to be less than 100 nm.