The effect of grinding conditions on lead zirconate titanate machinability
The effect of grinding conditions on lead zirconate titanate machinability
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DOI：
10.1016/s0955-2219(98)00426-9
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发表时间：
1999-01-01
影响因子：
5.7
通讯作者：
Whatmore, RW
中科院分区：
文献类型：
--
作者：
Goat, CA;Whatmore, RW
在许多现有和新兴的铁电体应用中，需要对铁电体进行高精度加工，并控制表面和整齐的表面特性。对于微型设备来说尤其如此。对于此类器件，由于晶粒拉拔、强度下降和近表面区域的去极化，裂纹和铁弹性域重新取向会导致器件性能显着下降。确定控制切削加工性的工艺参数并表征其效果至关重要。根据这些信息，可以选择最佳加工条件。已经在适合压电致动器应用的四种锆钛酸铅组合物中研究了固定磨料切割条件的影响。通过图像分析研究了脆性表面损伤的严重程度。已通过去极化区域对不同宽度的阵列元件的压电耦合因数的影响来测量去极化区域的厚度。已经确定，机械加工性能对砂轮粒度、进给速度和材料成分特别敏感。 (C) 1999 爱思唯尔科学有限公司。版权所有。
In many of the existing and newly emerging applications for ferroelectrics there is a need to machine them to high precision, with control over the surface and neat surface properties. This is particularly the case regarding microdevices. With such devices, cracking and ferroelastic domain reorientation can result in significant degradation in device performance due to grain pullout, strength degradation and depoling of the near surface region. It is vital that rite parameters controlling machinability are determined and their effects characterised. From such information, optimum machining conditions may then be selected. The effects of fixed abrasive dicing conditions have been studied in four lead zirconate titanate compositions suitable for piezoelectric actuator applications. The severity of brittle surface damage has been investigated by image analysis. The thicknesses of the depoled regions have been measured by their effects on the piezoelectric coupling factors of array elements of various widths. It has been established that machinability is particularly sensitive to wheel grit size, feed rate and material composition. (C) 1999 Elsevier Science Limited. All rights reserved.