Hard X-Ray Microtomography Using X-Ray Imaging Optics

Hard X-Ray Microtomography Using X-Ray Imaging Optics
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使用 X 射线成像光学器件的硬 X 射线显微断层扫描

DOI:
10.1143/jjap.40.1499
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发表时间:
2001
影响因子:
1.5
通讯作者:
S. Aoki
S. Aoki
中科院分区:
物理与天体物理4区
文献类型:
--
作者:
A. Takeuchi;K. Uesugi;Yoshio Suzuki;S. Aoki

文献摘要

被引文献

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第一个使用 X 射线成像光学器件测试硬 X 射线显微断层扫描的实验是在 SPring-8 的波荡器光束线 BL47XU 上进行的。使用 Wolter 型掠入射镜作为物镜。使用与荧光屏和中继透镜耦合的电荷耦合器件(CCD)相机(像素尺寸:6μm×6μm,空间分辨率:半高全宽(FWHM)12.3μm)作为检测器。使用 Si(111) 双晶单色仪将 X 射线能量选择为 9 keV。 X射线显微镜系统的放大倍率为3.71,换算后的物面像素尺寸为1.6μm×1.6μm。虽然无法获得三维图像,但成功重建了无菲涅尔条纹的二维图像。
The first experiment to test the hard X-ray microtomography using X-ray imaging optics was carried out at the undulator beamline BL47XU of SPring-8. A Wolter type grazing incidence mirror was used as an objective. A charge coupled device (CCD) camera coupled with a phosphor screen and a relay lens (pixel size: 6 µm×6 µm, spatial resolution: 12.3 µm in full width at half maximum (FWHM)) was used as a detector. X-ray energy was selected to be 9 keV using a Si(111) double crystal monochromator. The magnification of the X-ray microscope system was 3.71 and the converted pixel size at the object plane was 1.6 µm×1.6 µm. Although three-dimensional images could not be obtained, Fresnel-fringe-free two-dimensional images were successfully reconstructed.