Optically pumped ultraviolet lasing from nitride nanopillars at room temperature
Optically pumped ultraviolet lasing from nitride nanopillars at room temperature
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DOI：
10.1063/1.3449576
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发表时间：
2010-06-14
影响因子：
4
通讯作者：
Choi, H. W.
中科院分区：
文献类型：
--
作者：
Chen, Rui;Sun, H. D.;Choi, H. W.
提出了一种由原位生长的底部AlxGa 1-xN/AlyGa 1-yN分布布拉格反射镜和顶部SiO2/HfO 2介质镜组成的垂直腔紫外发射结构。通过纳米球光刻结合电感耦合等离子体刻蚀的方法，获得了直径约为500 nm的密排纳米柱。在室温下观察到波长为343.7 nm（3.608 eV）的光泵浦紫外激光，阈值激发密度为0.52 MW/cm（2）。详细讨论了激光作用的机理。我们的研究表明，在氮化物基谐振腔器件，特别是朝着实现紫外氮化物基垂直腔面发射激光器的前景。(C)2010年美国物理学会。[doi：10.1063/1.3449576]
A vertical cavity structure composing of an in situ grown bottom AlxGa1-xN/AlyGa1-yN distributed Bragg reflector and a top SiO2/HfO2 dielectric mirror for ultraviolet (UV) emission has been demonstrated. Close-packed nanopillars with diameters of around 500 nm have been achieved by the route of nanosphere lithography combined with inductively-coupled plasma etching. Optically-pumped UV lasing at a wavelength of 343.7 nm (3.608 eV) was observed at room temperature, with a threshold excitation density of 0.52 MW/cm(2). The mechanism of the lasing action is discussed in detail. Our investigation indicates promising possibilities in nitride-based resonant cavity devices, particularly toward realizing the UV nitride-based vertical-cavity surface-emitting laser. (C) 2010 American Institute of Physics. [doi:10.1063/1.3449576]