CW operation on APF-IH linac as a heavy ion implanter

CW operation on APF-IH linac as a heavy ion implanter
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DOI:
10.1016/j.nima.2010.07.043
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发表时间:
2010-10
影响因子:
1.4
通讯作者:
L. Lu;T. Hattori;N. Hayashizaki
L. Lu;T. Hattori;N. Hayashizaki
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
L. Lu;T. Hattori;N. Hayashizaki

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在这项工作中,我们介绍了新型交替相位聚焦叉指 H (APF-IH) 漂移管 (DT) 直线加速器的设计和制造细节。使用该设备,我们能够成功地将 He+离子从 80 keV 加速到 193.6keV。直线加速器设计采用先进的功率效率配置APF-IH结构,在中低能量区域具有较高的加速效率。在设计过程中,对频率与功率、网格、端脊调谐器(ERT、DT直径)之间的关系进行了表征。这项工作的独特之处在于,制造过程不是基于直接测量的传统设计方法,而是采用先进的计算机数值设计和模拟方法。使用五轴数控机床在不对准的情况下制造整体主机架(包括加速结构,包括漂移管、杆和脊)。实验结果表明,测量值,包括操作频率、Q值、轴向电量分布、加速消耗功率均在设计范围内;实测运行频率为设计要求的99.95%。
In this work we present details of the design and manufacture of a new alternating phase focus-interdigital H (APF-IH) drift tube (DT) linac. Using this apparatus we were able to successfully accelerate He+ions from 80 up to 193.6keV. The linac design employs an advanced power-efficiency configuration, APF-IH structure, which has high acceleration efficiency in the low-to-middle energy region. In the design process the relationships between frequency and power, and mesh, end ridge tuner) (ERT, and DT diameter were characterized. The unique aspect of this work is that the fabrication process was not based on direct measurement, which is the traditional design method; instead advanced computer numerical design and simulation methods were employed. A 5-axis numerical control machine was used to fabricate the integral main frame (including acceleration structure, which includes drift tubes, stems, and ridges) without alignment. The experimental results showed that measured values, including the operation frequency, the Q value, the axial electric distribution, and the consumed power for acceleration, were within the design limits; in particular, the measured operation frequency is 99.95% of the design requirement.