Sensor Egregium—An Atomic Force Microscope Sensor for Continuously Variable Resonance Amplification
Sensor Egregium—An Atomic Force Microscope Sensor for Continuously Variable Resonance Amplification
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DOI：
10.1115/1.4050274
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发表时间：
2021-08
期刊：
影响因子：
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通讯作者：
R. Shihab;Tasmirul Jalil;Burak Gulsacan;M. Aureli;R. Tung
中科院分区：
文献类型：
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作者：
R. Shihab;Tasmirul Jalil;Burak Gulsacan;M. Aureli;R. Tung
许多涉及探测各种频率相关特性的纳米计量技术将受益于具有可调固有频率的悬臂传感器。在这项工作中，我们提出了一种任意调整原子力显微镜应用微板传感器的刚度和固有频率的方法，从而允许在较宽的频率范围内进行共振放大。该方法基于基于曲率的刚化原理。通过宏观实验验证了该方法的可行性。接下来，在概念验证设备上进行微尺度有限元分析。我们表明，设备的刚度和各种固有频率都可以通过施加的横向曲率来控制。讨论了该方法中遇到的动态现象，例如特征值曲线转向，并提出了适应这些现象的方法。我们相信这项研究将促进未来用于原子力显微镜应用的基于曲率的微型传感器的开发。
Numerous nanometrology techniques concerned with probing a wide range of frequency-dependent properties would benefit from a cantilevered sensor with tunable natural frequencies. In this work, we propose a method to arbitrarily tune the stiffness and natural frequencies of a microplate sensor for atomic force microscope applications, thereby allowing resonance amplification at a broad range of frequencies. This method is predicated on the principle of curvature-based stiffening. A macroscale experiment is conducted to verify the feasibility of the method. Next, a microscale finite element analysis is conducted on a proof-of-concept device. We show that both the stiffness and various natural frequencies of the device can be controlled through applied transverse curvature. Dynamic phenomena encountered in the method, such as eigenvalue curve veering, are discussed and methods are presented to accommodate these phenomena. We believe that this study will facilitate the development of future curvature-based microscale sensors for atomic force microscopy applications.