Broadband and time-resolved absorption spectroscopy with light emitting diodes: Application to etching plasma monitoring
Broadband and time-resolved absorption spectroscopy with light emitting diodes: Application to etching plasma monitoring
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DOI：
10.1063/1.2822448
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发表时间：
2007-12-03
影响因子：
4
通讯作者：
Sadeghi, N.
中科院分区：
文献类型：
--
作者：
Cunge, G.;Vempaire, D.;Sadeghi, N.
宽带吸收光谱技术被广泛用于测量自由基的浓度，这对于理解许多等离子体的物理化学是非常重要的。通过使用发光二极管（LED）作为光源，可以提高该技术的灵敏度并进行时间分辨测量。该方法已用于高密度等离子体中CF（2）自由基和Cl（2）分子的检测。在10 ms积分时间内，检测限低至3 mTorr的Cl（2）。我们的结论是，与LED的吸收光谱打开精确的过程控制和反应介质的基本分析的可能性。
Broad band absorption spectroscopy is widely used to measure the concentration of radicals, which is important to understand the physical chemistry of many plasmas. It is possible to increase the sensitivity of this technique and to perform time-resolved measurement by using light emitting diodes (LEDs) as a light source. The method is applied to detect CF(2) radicals and Cl(2) molecules in high density plasmas. The detection limit over 10 ms integration time is as low as 3 mTorr of Cl(2). We conclude that the absorption spectroscopy with LEDs opens possibilities for precise process control and fundamental analysis of reactive media.