MOCVD epitaxy of β-(AlxGa1−x)2O3 films on (100) and (-201) β-Ga2O3 substrates with Al compositions up to 52%
MOCVD epitaxy of β-(AlxGa1−x)2O3 films on (100) and (-201) β-Ga2O3 substrates with Al compositions up to 52%
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MOCVD%20外延%20of%20β-(AlxGa1–x)2O3%20films%20on%20(100)%20and%20(-201)%20β-Ga2O3%20基板%20with%20Al%20compositions%20up%20to%2052
DOI:
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发表时间:
2021
期刊:
影响因子:
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通讯作者:
A F M A. U. Bhuiyan, Z. Feng
中科院分区:
文献类型:
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作者:
A F M A. U. Bhuiyan, Z. Feng