Role of oxidizing agent: thin film formation by photo-oxidizing silicone oil for vacuum UV rays transmittance and high hardness
Role of oxidizing agent: thin film formation by photo-oxidizing silicone oil for vacuum UV rays transmittance and high hardness
复制标题
氧化剂的作用：光氧化硅油形成薄膜，提高真空紫外线透过率和高硬度
DOI：
10.1117/12.977393
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发表时间：
2012
期刊：
影响因子：
--
通讯作者：
Murahara Masataka
中科院分区：
文献类型：
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作者：
Masataka Murahara;Yuji Sato and Toshio Ohkawara;Murahara Masataka;Yuji Sato;Murahara Masataka
Xe2准分子灯光氧化硅油需要氧化剂。然而，灯光未能令人满意地到达基材表面的硅油，硅油层的光氧化反应难以正常进行。为了找到向硅油提供适量氧化剂的适当条件，使穿过硅油层的真空紫外光在荧光粉中发出荧光以监测光氧化反应的进展。随着硅油层的光氧化反应的玻璃化改善，荧光体的荧光强度增加。在监测荧光强度变化的同时，控制氧化剂的供给量和真空紫外光的照射时间；结果，建立了有效形成透明光氧化薄膜的新方法。
An oxidizing agent is needed for silicone oil to be photo-oxidized with Xe2 excimer-lamp. However, the lamp light did not reach the silicone oil on the surface of the substrate satisfactorily, and the photo-oxidation reaction of the silicone oil layer was hard to take place properly. In order to find the appropriate conditions for supplying the proper amount of an oxidizing agent to silicone oil, the vacuum ultraviolet light that passed the silicone oil layer was made fluoresce in the phosphor to monitor the progress of the photo-oxidation reaction. As the vitrification by photo-oxidation reaction of the silicone oil layer improved, the fluorescence intensity of the phosphor increased. While monitoring the change of the fluorescence intensity, the supply of the oxidizing agent and the irradiation time of the vacuum ultraviolet light were controlled; as a result, the new method to efficiently form a transparent, photo-oxidized thin film has been established.