Elastic constants of tetrahedral amorphous carbon films by surface Brillouin scattering
Elastic constants of tetrahedral amorphous carbon films by surface Brillouin scattering
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DOI：
10.1063/1.124863
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发表时间：
1999-09-27
影响因子：
4
通讯作者：
Pastorelli, R
中科院分区：
文献类型：
--
作者：
Ferrari, AC;Robertson, J;Pastorelli, R
用表面布里渊散射法非破坏性地测量了四面体非晶碳（ta-C）和氢化四面体非晶碳（ta-C：H）薄膜的弹性常数。除了通常的瑞利表面模式，我们还观察到一个新的伪表面声波模式的纵向极化，这是一个修改后的版本的纵向引导模式通常发现在慢对快支持的薄膜。具有88%sp（3）的ta-C的杨氏模量E为757 GPa，剪切模量G为337 GPa。测定了70%sp（3）和30 at. % H较低，E = 300 GPa和G = 115 GPa。(C)1999年美国物理学会。[S0003-6951（99）02538-3]。
The elastic constants of tetrahedral amorphous carbon (ta-C) and hydrogenated tetrahedral amorphous carbon (ta-C:H) thin films were determined nondestructively by surface Brillouin scattering. Besides the usual Rayleigh surface mode, we also observe a new pseudosurface acoustic mode of longitudinal polarization, which is a modified version of the longitudinal guided mode usually found in slow-on-fast supported films. The Young's modulus E of a ta-C with 88% sp(3) is 757 GPa, and the shear modulus G is 337 GPa. The moduli of ta-C:H with 70% sp(3) and 30 at. % H are lower, E = 300 GPa and G = 115 GPa. (C) 1999 American Institute of Physics. [S0003-6951(99)02538-3].