3D-printed miniature gas cell for photoacoustic spectroscopy of trace gases
3D-printed miniature gas cell for photoacoustic spectroscopy of trace gases
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DOI：
10.1364/ol.39.004796
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发表时间：
2014-08-15
期刊：
影响因子：
3.6
通讯作者：
Lengden, Michael
中科院分区：
文献类型：
--
作者：
Bauer, Ralf;Stewart, George;Lengden, Michael
提出了一种利用3D打印技术开发微型光声痕量气体传感器的新方法。近红外分布反馈（DFB）激光器与聚合物基气室、现成的光纤准直器和微机电系统（MEMS）麦克风一起用于测量1532.83 nm处的乙炔。的微型气室的谐振行为进行了分析，使用理论和实验方法，测量的谐振频率为15.25 kHz和Q因子为15。最小归一化噪声等效吸收为4.5 x 10（-9）W cm（-1）Hz（-1/2），信号平均时间为35 s，3 sigma检测限为750 ppb。光纤耦合传输和微型成本效益单元设计允许在多点和远程检测应用中使用。(C)2014年美国光学学会
A new methodology for the development of miniature photoacoustic trace gas sensors using 3D printing is presented. A near-infrared distributed feedback (DFB) laser is used together with a polymer-based gas cell, off-the-shelf fiber optic collimators, and a microelectromechanical system (MEMS) microphone to measure acetylene at 1532.83 nm. The resonance behavior of the miniature gas cell is analyzed using a theoretical and experimental approach, with a measured resonance frequency of 15.25 kHz and a Q-factor of 15. A minimum normalized noise equivalent absorption of 4.5 x 10(-9) W cm(-1) Hz(-1/2) is shown together with a 3 sigma detection limit of 750 parts per billion (ppb) for signal averaging times of 35 s. The fiber-coupled delivery and miniature cost-effective cell design allows for use in multipoint and remote detection applications. (C) 2014 Optical Society of America