Design and fabrication of a MEMS high-efficiency NIR-scanning grating based on tilted (111) silicon wafer
Design and fabrication of a MEMS high-efficiency NIR-scanning grating based on tilted (111) silicon wafer
复制标题
基于倾斜（1 1 1）硅片的MEMS高效近红外扫描光栅的设计与制作
DOI：
10.1051/epjap/2015150285
复制
发表时间：
2015-10-01
影响因子：
1
通讯作者：
Huang, Jian
中科院分区：
文献类型：
--
作者：
Nie, Qiuyu;Wen, Zhiyu;Huang, Jian
研制成功了一种用于近红外显微光谱仪的MEMS高效扫描光栅。本文介绍了它的设计，制造和测量结果。与先前报道的矩形和V形凹槽光栅扫描器相比，所提出的闪耀光栅扫描器-其中闪耀光栅可以通过湿法各向异性蚀刻倾斜（111）硅衬底来获得，并且可以通过选择器件硅的适当倾斜角来容易地实现所需闪耀角-具有以更高衍射效率扫描的潜力。设计了电磁式角度传感器，用于检测扫描光栅的状态，并为闭环控制提供反馈信号。我们已经展示了一个原型与4 μ m的光栅常数和闪耀角为7.54度。实验结果表明，在1392 nm波长处，-1级衍射效率可达70%。角度传感器的输出电压与光栅扫描器的光学扫描角度具有良好的线性关系，在不放大的情况下，角度传感器的灵敏度为0.54 mV/度。
A MEMS high-efficiency scanning grating for near infrared micro spectrometers has been successfully developed. This paper presents its design, fabrication, and measurement results. Compared with previously reported rectangular and V-shaped groove grating scanners, the presented blazed grating scanner - in which the blazed grating can be obtained by wet anisotropic etching a tilted (1 1 1) silicon substrate, and the desired blaze angle can be easily realized by choosing the appropriate tilt angle of device silicon - has the potential to scan at higher diffraction efficiency. Moreover, an electromagnetic angle sensor is designed to detect the state of the scanning grating and supply the feedback signal for close loop control. We have demonstrated a prototype with grating constants of 4 mu m and blazed angle of 7.54 degrees. Experimental results have showed that the diffraction efficiencies of the -1st order can reach 70% at the wavelength of 1392 nm. The output voltages of angle sensor have a good linear relationship with optical scan angle of the grating scanner, and the sensitivity of the angle sensor is 0.54 mV/degrees without amplifying.