Technology and applications of micromachined silicon adaptive mirrors
Technology and applications of micromachined silicon adaptive mirrors
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微机械硅自适应镜技术及应用
DOI：
10.1117/1.601334
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发表时间：
1997
影响因子：
1.3
通讯作者：
P. Sarro
中科院分区：
文献类型：
--
作者：
G. Vdovin;S. Middelhoek;P. Sarro
报道了低成本高质量微机械自适应反射镜技术。自适应反射镜是通过将体硅微机械加工与标准电子技术相结合来制造的。具有数十个控制通道的反射镜，与平面的RMS初始偏差为？/ 20和范围的表面偏转10至20？m，线性频率响应范围为50 Hz至1 kHz，是在标准PCB基板上制造的。目前正在开发具有数百个控制通道、要求集成驱动器和开关电子器件的先进设备
The technology of low-cost high-quality micromachined adaptive mirrors is reported. Adaptive mirrors are fabricated by combining bulk silicon micromachining with standard electronics technologies. Mirrors with tens of control channels, having RMS initial deviation from plane of the order of ?/20 and a range of surface deflection of 10 to 20 ?m with linear frequency response in the range of 50 Hz to 1 kHz, are fabricated on standard PCB substrates. Advanced devices with hundreds of control channels, demanding integration of driver and switching electronics, are currently under development