Investigation of laser sputtering of iron at low fluence using resonance ionization mass spectrometry
Investigation of laser sputtering of iron at low fluence using resonance ionization mass spectrometry
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使用共振电离质谱法研究低能量密度下铁的激光溅射
DOI：
10.1063/1.354527
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发表时间：
1993
影响因子：
3.2
通讯作者：
J. Debrun
中科院分区：
文献类型：
--
作者：
T. Gibert;B. Dubreuil;M. Barthe;J. Debrun
研究了在溅射阈值（几十mJ/cm ~ 2）~ 320 mJ/cm ~ 2范围内，N_2激光（λ=337 nm）照射铁靶引起的中性和电离Fe原子的发射。共振电离质谱的独特灵敏度允许识别激光溅射的中性粒子，研究它们的速度分布和激发状态，并在非常低的发射水平下测量激光溅射产率（每次激光发射去除100个Fe原子）。在这种软烧蚀模式下，似乎溅射的原子携带有关铁表面的激光溅射中所涉及的主要机制的直接信息。本研究证实了一个热过程中，激光束作为一个脉冲热源。所发射的中性原子的能量特性相当好地反映了表面的热状态，原子温度从阈值处的环境增加到熔化和沸腾温度以增加激光能量。
Emission of neutral and ionized Fe atoms induced by N2 laser irradiation (λ=337 nm) of iron targets was investigated for laser fluences ranging from the sputtering threshold (a few tens mJ/cm2) up to 320 mJ/cm2. The unique sensitivity of resonance ionization mass spectrometry permitted to identify the laser‐sputtered neutral particles, to study their velocity distribution and excitation state, and to measure the laser‐sputtering yield at a very low emission level (100 Fe atoms removed per laser shot). In this soft ablation mode, it appears that the sputtered atoms carry direct information on the primary mechanisms involved in the laser sputtering of an iron surface. The present study corroborates a thermal process in which the laser beam acts as a pulsed heat source. Energy characteristics of the emitted neutral atoms reflect rather well the thermal state of the surface, the atom temperature increasing from the ambient at threshold to melting and boiling temperatures for growing laser energies.