Wireless Surface Acoustic Wave Pressure and Temperature Sensor With Unique Identification Based on LiNbO3
Wireless Surface Acoustic Wave Pressure and Temperature Sensor With Unique Identification Based on LiNbO3
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DOI：
10.1109/jsen.2013.2241052
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发表时间：
2013-05-01
影响因子：
4.3
通讯作者：
Schmitt, Daniel
中科院分区：
文献类型：
--
作者：
Binder, Alfred;Bruckner, Gudrun;Schmitt, Daniel
温度约为 200 摄氏度及以上的无线传感器应用需要强大的技术，例如表面声波 (SAW) 传感器设计。基于 LiNbO3 基板，开发了一种具有识别功能的组合压力/温度传感器，用于烘焙行业的状态监测应用。由于给定的温度规格并为了避免使用粘合剂，传感器的设计被认为是由三个球支撑的经典梁布置。本文概述了传感器的设计过程，首先是传感器的机械仿真以及用于测量压力、温度和实现 ID 功能的 SAW 延迟线的推导。主要结果是压力灵敏度为 3.7 rad/bar，温度漂移为 0.013 rad/℃。压力传感器的灵敏度也与温度有关。这种复合温度漂移可以通过传感器固有的温度信息进行补偿。
Wireless sensor applications at elevated temperatures of around 200 degrees C and above call for robust technologies such as surface acoustic wave (SAW) sensor designs. A combined pressure/temperature sensor with identification has been developed based on LiNbO3 substrate for condition monitoring applications in the baking industry. Due to the given temperature specification and to avoid adhesives, the design of the sensor was conceived as a classical beam arrangement supported by three balls. This paper presents an overview on the design process of the sensor beginning with the mechanical simulation of the sensor and the derivation of the SAW delay line to measure pressure, temperature, and to realize an ID functionality. The main result is a pressure sensitivity of 3.7 rad/bar with a temperature drift of 0.013 rad/degrees C. The sensitivity of the pressure sensor is also temperature dependent. This compound temperature drift can be compensated with the inherent temperature information of sensor.