Molecular lubricants for silicon‐based microelectromechanical systems (MEMS): a novel assembly strategy
Molecular lubricants for silicon‐based microelectromechanical systems (MEMS): a novel assembly strategy
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DOI：
10.1023/a:1019169303629
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发表时间：
1999-09
影响因子：
3.2
通讯作者：
X.Y. Zhu;J. Houston
中科院分区：
文献类型：
--
作者：
X.Y. Zhu;J. Houston
