Complex permittivity of common dielectrics in 20–110 GHz frequency range measured with a Fabry–Pérot open resonator
Complex permittivity of common dielectrics in 20–110 GHz frequency range measured with a Fabry–Pérot open resonator
复制标题
使用法布里-珀罗开放式谐振器测量 20-110 GHz 频率范围内常见电介质的复介电常数
作者：
B. Salski;J. Cuper;T. Karpisz;P. Kopyt;J. Krupka
法布里-珀罗开腔器是一种专用于宽带精确微波和毫米波表征介质片的工具。本文已将其应用于20-110 GHz范围内半导体、电子衬底、玻璃、塑料等各类常用介质材料的介电常数和损耗正切的测量。得到的结果与文献数据很好地一致，然而，这些数据通常只能在离散频率上获得，因此很难识别被测样品的色散特性。本文表明，宽带测量高电阻率和本征硅可以提取其电阻率仅由于传导损失。在典型电子衬底的情况下，表明它们的介电常数几乎是非色散的，而损耗通常随频率线性增加。玻璃也表现出几乎非色散介电常数，然而，大于3.8，而它们的损失可以根据性质变化超过两个数量级，如羟基含量。最低的介电常数很容易在普通塑料中实现，从约2.03的特氟龙到约3.0的PETG。
A Fabry–Perot open resonator is a tool dedicated to broadband accurate microwave and mm-wave characterization of dielectric sheets. It has been applied in this paper to the measurement of the dielectric constant and loss tangent of various types of commonly used dielectric materials, such as semiconductors, electronic substrates, glasses, and plastics, in the 20–110 GHz range. The obtained results are in good agreement with the literature data, which are, however, often available only at discrete frequencies, thus making it difficult to recognize dispersive properties of the measured samples. It is shown in this paper that broadband measurement of high-resistivity and intrinsic silicon allows extracting their resistivity solely due to conduction losses. In the case of typical electronic substrates, it is shown that their dielectric constant is almost non-dispersive, whereas losses are, in general, linearly increasing with frequency. Glasses also exhibit almost non-dispersive dielectric constant, which is, however, larger than 3.8, whereas their losses can vary by over two orders of magnitude depending on the properties, like the hydroxyl content. The lowest dielectric constant is easily achievable in common plastics, spanning from ca. 2.03 for Teflon up to ca. 3.0 for PETG.