A sensor-based monitoring approach to predict surface profile of vibration-assisted atomic force microscopy (AFM)-based nanofabrication
A sensor-based monitoring approach to predict surface profile of vibration-assisted atomic force microscopy (AFM)-based nanofabrication
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DOI：
10.1016/j.mfglet.2023.08.109
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发表时间：
2023-08
影响因子：
3.9
通讯作者：
Xinchen Wang;Huimin Zhou;Jia Deng;Zimo Wang
中科院分区：
文献类型：
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作者：
Xinchen Wang;Huimin Zhou;Jia Deng;Zimo Wang
