Increasing the accuracy of tilted-wave-interferometry by elimination of systematic errors
Increasing the accuracy of tilted-wave-interferometry by elimination of systematic errors
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DOI：
10.1117/12.2270395
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发表时间：
2017-06
期刊：
影响因子：
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通讯作者：
J. Schindler;C. Pruss;W. Osten
中科院分区：
文献类型：
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作者：
J. Schindler;C. Pruss;W. Osten
本文研究了如何消除倾斜波干涉测量中的校准误差，以降低测量不确定度。模型参数和测量结果中的误差之间的相关性进行了研究，同时考虑到被测表面的对称性。介绍了消除这种误差的两种方案：围绕z轴的旋转允许去除非旋转对称的误差分量。横向剪切测量允许消除具有更高空间频率的校准误差。相应的算法和底层模型的解释，这两种方法和他们的应用程序的例子。
This work investigates methods to eliminate calibration errors as one of the limiting factors to reduce measurement uncertainty in Tilted-Wave-Interferometry. The correlations between errors in the model parameters and in the measurement result are investigated, taking into account the symmetry of the surface under test. Two schemes for the elimination of such errors are introduced: Rotations around the z-axis allow the removal on non-rotationally symmetric error components. Measurements in lateral shears allow the elimination of calibration errors with higher spatial frequency. The corresponding algorithms and underlying models are explained for both approaches and examples for their application are presented.