Extremely foldable LTPS TFT backplane using blue laser annealing for low-cost manufacturing of rollable and foldable AMOLED display
Extremely foldable LTPS TFT backplane using blue laser annealing for low-cost manufacturing of rollable and foldable AMOLED display
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DOI：
10.1002/jsid.1024
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发表时间：
2021-05-05
影响因子：
2.3
通讯作者：
Jang, Jin
中科院分区：
文献类型：
--
作者：
Lee, Suhui;Do, Youngbin;Jang, Jin
通过蓝色激光退火（BLA）的a-Si结晶被引入用于可折叠和可卷曲AMOLED显示器的低成本、高分辨率薄膜晶体管（TFT）背板。BLA的一大优点是为低温多晶硅（LTPS）提供了无掺杂的有源沟道。在柔性衬底上制备的BLA LTPS TFT具有169 cm（2）/Vs的高场效应迁移率，小于201 mV/dec的亚阈值电压摆幅，以及优异的电稳定性和机械鲁棒性。
The crystallization of a-Si by blue laser annealing (BLA) is introduced for low-cost, high-resolution thin-film transistor (TFT) backplanes for foldable and rollable AMOLED displays. A big advantage of BLA is to provide low-temperature polycrystalline silicon (LTPS) with protrusion-free active channel. The BLA LTPS TFT manufactured on flexible substrate exhibits high field-effect mobility of 169 cm(2)/Vs, a smaller subthreshold voltage swing less than 201 mV/dec, and excellent electrical stability and mechanical robustness.