Flow, Temperature and Concentration Fields in Reactive Plasmas in an Inductively Coupled RF Discharge—Characteristics in Argon-Oxygen and Argon-Nitrogen Thermal Plasmas—
Flow, Temperature and Concentration Fields in Reactive Plasmas in an Inductively Coupled RF Discharge—Characteristics in Argon-Oxygen and Argon-Nitrogen Thermal Plasmas—
复制标题
感应耦合射频放电中反应等离子体的流动、温度和浓度场——氩-氧和氩-氮热等离子体的特性——
DOI：
10.1252/jcej.24.25
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发表时间：
1991
影响因子：
0.8
通讯作者：
A. Kanzawa
中科院分区：
文献类型：
--
作者：
Takayuki Watanabe;Naoto Tonoike;T. Honda;A. Kanzawa
对大气压下射频氩氧和氩氮热等离子体进行了数值模拟。采用SIMPLER算法求解二维连续性方程、动量方程、能量方程和组分方程。数值模型考虑了等离子体中氧或氮的解离和复合速率。用水冷探针测量了等离子体焓和浓度的分布。数值计算结果与实验结果吻合较好，氩氧等离子体存在较强的再循环涡。除管壁附近外，O2在涡流下游完全解离。在氩氮等离子体中，即使在高温区域，N2的质量分数也是显著的。
Numerical simulations of RF argon-oxygen and argon-nitrogen thermal plasmas under atmospheric pressure were performed. Two-dimensional continuity, momentum, energy and species equations were solved simultaneously with the electromagnetic equations by using the SIMPLER algorithm. Dissociation and recombination rates of oxygen or nitrogen in the plasmas were taken into account in the numerical model. Distributions of the plasma enthalpy and concentration were measured with a water-cooled probe. The numerical results were in good agreement with the experimental ones.The argon-oxygen plasma has a strong recirculating eddy. O2 is dissociated completely downstream from the eddy except near the tube wall. In the argon-nitrogen plasma, the mass fraction of N2 is significant even in the high-temperature region.