Acoustic subsurface-atomic force microscopy: Three-dimensional imaging at the nanoscale
Acoustic subsurface-atomic force microscopy: Three-dimensional imaging at the nanoscale
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DOI：
10.1063/5.0035151
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发表时间：
2021-01
影响因子：
3.2
通讯作者：
H. J. Sharahi;M. Janmaleki;L. Tetard;Seonghwan Kim;H. Sadeghian;G. Verbiest
中科院分区：
文献类型：
--
作者：
H. J. Sharahi;M. Janmaleki;L. Tetard;Seonghwan Kim;H. Sadeghian;G. Verbiest
声表面下原子力显微镜自20世纪90年代初问世以来，已经取得了长足的发展，它通过在传统原子力显微镜中引入超声激励，有望以个位数的纳米分辨率进行三维成像。最近的进展提供了对实验观察到的不同对比机制的定量理解，为未来的应用铺平了道路。在这个视角下，我们首先回顾了亚表面原子力显微镜的不同形式：超声力显微镜、原子力声学显微镜、外差力显微镜、模式合成原子力显微镜和近场皮秒超声显微镜。然后，我们强调并解决了文献中存在的关于所选择的超声激励频率相对于悬臂的共振频率和观察到的对比机制的重要性的争论。最后，我们讨论了该领域尚待解决的问题，并激发了新的致动器、近场皮秒超声以及与其他技术的集成的重要性，以实现纳米级的多功能非破坏性三维成像。
The development of acoustic subsurface atomic force microscopy, which promises three-dimensional imaging with single-digit nanometer resolution by the introduction of ultrasound actuations to a conventional atomic force microscope, has come a long way since its inception in the early 1990s. Recent advances provide a quantitative understanding of the different experimentally observed contrast mechanisms, which paves the way for future applications. In this Perspective, we first review the different subsurface atomic force microscope modalities: ultrasonic force microscopy, atomic force acoustic microscopy, heterodyne force microscopy, mode-synthesizing atomic force microscopy, and near-field picosecond ultrasonic microscopy. Then, we highlight and resolve a debate existing in the literature on the importance of the chosen ultrasound excitation frequencies with respect to the resonance frequencies of the cantilever and the observed contrast mechanisms. Finally, we discuss remaining open problems in the field and motivate the importance of new actuators, near-field picosecond ultrasonics, and integration with other techniques to achieve multi-functional non-destructive three-dimensional imaging at the nanoscale.