Subwavelength-sized phase-change recording with a silicon planar apertured probe
Subwavelength-sized phase-change recording with a silicon planar apertured probe
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使用硅平面孔径探针进行亚波长尺寸的相变记录
DOI：
10.1117/12.363844
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发表时间：
1999
期刊：
影响因子：
--
通讯作者：
M. Ohtsu
中科院分区：
文献类型：
--
作者：
T. Yatsui;M. Kourogi;K. Tsutsui;J. Takahashi;M. Ohtsu
我们提出并展示了一种新的光学近场滑块与平面孔径探针阵列的光存储器。利用硅膜的各向异性腐蚀和硅膜与玻璃基板的阳极键合来制造滑块。我们还首次提出了亚波长尺寸的相变记录/阅读通过使用平面孔径探针阵列。在金字塔形凹槽的底端制造了结构。使用SiO2/AgInTe 2/玻璃基板作为记录介质。通过扫描平面孔径探针阵列，我们获得了分辨图像的线宽为250 nm。
We propose and demonstrate a new optical near-field slider with a planar apertured probe array for optical memory. The slider was fabricated by utilizing anisotropical etching of a silicon membrane and anodic bonding of a silicon membrane and glass substrate. We also present for the first time a subwavelength-sized phase-change recording/reading by using the planar apertured probe array. Apertures were fabricated at the bottom end of the pyramidal grooves. A SiO2/AgInTe2/glass substrate was used as the recording medium. By scanning the planar apertured probe array, we obtained resolved images with line width of 250 nm.