Rate Integrating Gyroscope Using Independently Controlled CW and CCW Modes on Single Resonator
Rate Integrating Gyroscope Using Independently Controlled CW and CCW Modes on Single Resonator
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DOI：
10.1109/jmems.2020.3039241
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发表时间：
2021-02-01
影响因子：
2.7
通讯作者：
Tanaka, Shuji
中科院分区：
文献类型：
--
作者：
Tsukamoto, Takashiro;Tanaka, Shuji
本文报道了一种在单个MEMS谐振器上采用独立控制的顺时针（CW）和逆时针（CCW）模式的速率积分陀螺仪。旋转角度由这些模式之间的相位差读出。采用CW/CCW模式分离器对叠加在谐振腔上的模式进行独立控制。频率和q因子失配由驱动信号的相位和幅值补偿。在现场可编程门阵列（FPGA）上实现了包括模式分离器、反馈控制器、信号发生器、失配补偿器在内的控制系统。采用所提出的失配补偿技术，等效的异向阻尼项变为1/100。结果表明，即使在5°/s左右的慢角速率区域，尺度因子保持不变，非线性也小于0.2%。此外，在没有任何温度校正的情况下，尺度因子的温度系数可小至-1.84 +/- 0.62 ppm/K。(2020 - 0011)
This paper reports a rate integrating gyroscope (RIG) using independently controlled clockwise (CW) and counter clockwise (CCW) modes on a single MEMS resonator. The rotation angle is read out by the phase difference between these modes. A CW/CCW mode separator was used to independently contol these modes superposed on the resonator. The frequency and Q-factor mismatches were compensated by the phases and amplitudes of driving signals. A control system including the mode separator, feedback controllers, signal generators, mismatch compensators were implemented in a field programmable gate array (FPGA). Using the proposed mismatch compensation technique, the equivallent aniso-damping term became 1/100. As a result, the scale factor became constant and the non-linearity became less than 0.2% even when the slow angular rate region around 5 degrees/s. In addition, the temperature coefficient of scale factor as small as -1.84 +/- 0.62 ppm/K was achieved without any temperature correction. [2020-0011]