Creation of perfect surfaces
Creation of perfect surfaces
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DOI：
10.1016/j.jcrysgro.2004.10.097
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发表时间：
2005-02-15
影响因子：
1.8
通讯作者：
Mimura, H
中科院分区：
文献类型：
--
作者：
Mori, Y;Yamamura, K;Mimura, H
本文概述了大坂大学超精密科学技术研究中心的研究活动。介绍了超精密加工新方法弹性发射加工（EEM）、等离子体化学蒸发加工（PCVM）、大气压等离子体化学气相沉积（PCVD）和氢氧基电化学加工（H-ECM）的物理概念和应用实例。(c)2004 Elsevier B. V.保留所有权利。
The paper overviews research activities at the "Research Center for Ultra Precision Science & Technology of Osaka University". It describes the motivation of the research, and the physical concepts of new ultraprecision machining methods; i.e. elastic emission machining (EEM), plasma chemical vaporization machining (PCVM), atmospheric pressure plasma chemical vapor deposition (PCVD), and hydroxyl electrochemical machining (H-ECM), and some application examples achieved by utilizing above methods are introduced. (c) 2004 Elsevier B.V. All rights reserved.