Vibration compensation of wavelength scanning interferometer for in-process surface inspection
Vibration compensation of wavelength scanning interferometer for in-process surface inspection
复制标题
用于过程表面检测的波长扫描干涉仪的振动补偿
DOI：
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发表时间：
2010
期刊：
影响因子：
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通讯作者：
F. Gao
中科院分区：
文献类型：
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作者：
H. Muhamedsalih;Xiang Jiang;F. Gao
研制了一种振动稳定的波长扫描干涉仪（WSI），用于在线或在线测量。本文介绍了WSI系统的振动补偿部分。通过将参考干涉仪与主WSI复用来提供振动补偿
干涉仪参考干涉仪与WSI干涉仪具有不同的光源和波长，但两者共用一条光路，参考干涉仪作为相位补偿机构消除环境噪声的影响。提出了一种在机械扰动下半导体子板结构表面的测量方法。测试结果表明，该系统能够承受环境噪声。
A vibration stabilized Wavelength Scanning Interferometer (WSI) is developed for online or in-process measurement purposes. This paper describes the vibration compensation part of the WSI system. The vibration compensation is provided by multiplexing a reference interferometer with the main WSI
interferometer. The reference interferometer has a different light source and wavelength from the WSI interferometer but both are sharing common optical path. The reference interferometer serves as a phase-compensating mechanism to eliminate the effects of environmental noise. A structured surface measurement of a semiconductor daughterboard, under mechanical disturbance, is presented. The measurement results showed that the system can withstand environmental noise.