A parametric electrostatic resonator using repulsive force
A parametric electrostatic resonator using repulsive force
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DOI：
10.1016/j.sna.2018.04.001
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发表时间：
2018-07
期刊：
影响因子：
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通讯作者：
Mark Pallay;Shahrzad Towfighian
中科院分区：
文献类型：
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作者：
Mark Pallay;Shahrzad Towfighian
本文研究了斥力静电谐振器的参数激励问题。建立了理论模型，并用实验数据进行了验证。通过与Mathieu方程的对应关系，证明了参数共振的存在性和位置。斥力产生了一个组合响应，当驱动在其固有频率的两倍时，显示参数和次谐波共振。谐振器可以达到接近24 μm的大振幅，并且可以在敲击电极时保持动态稳定。由于消除了拉入不稳定性，光束在撞击后反弹而不是粘在电极上。这创造了更大、更稳定的轨迹，这是传统静电驱动所无法实现的。对于需要大信噪比的MEMS谐振器来说，大动态范围是有吸引力的。
In this paper, parametric excitation of a repulsive force electrostatic resonator is studied. A theoretical model is developed and validated by experimental data. A correspondence of the model to Mathieu's Equation is made to prove the existence and location of parametric resonance. The repulsive force creates a combined response that shows parametric and subharmonic resonance when driven at twice its natural frequency. The resonator can achieve large amplitudes of almost 24 μm and can remain dynamically stable while tapping on the electrode. Because the pull-in instability is eliminated, the beam bounces off after impact instead of sticking to the electrode. This creates larger, stable trajectories that would not be possible with traditional electrostatic actuation. A large dynamic range is attractive for MEMS resonators that require a large signal-to-noise ratio.