Plate geometries for contact resonance atomic force microscopy: Modeling, optimization, and verification

Plate geometries for contact resonance atomic force microscopy: Modeling, optimization, and verification
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DOI:
10.1063/1.5038727
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发表时间:
2018-07-07
影响因子:
3.2
通讯作者:
Tung, Ryan C.
Tung, Ryan C.
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
Aureli, Matteo;Ahsan, Syed N.;Tung, Ryan C.

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提出了一种基于二维Kirchhoff-Love平板框架的接触共振原子力显微镜(CR-AFM)方法。理论公式进行了讨论,经典的CR-AFM问题被重新铸造成一个易于实现的广义特征值问题。进行了分析,以确定不同的长宽比的板的传感尖端的最佳位置。最后,使用有限元方法进行了实验,以数值验证所提出的技术。通过使用CR-AFM板的几何形状和优化的传感器尖端的位置,我们实现了更高的测量灵敏度和模式密度相比,标准的AFM悬臂梁几何形状。更高的模态密度允许CR-AFM测量使用更多的信息在给定的频率带宽中提取本征模来进行。出版社:AIP Publishing
A novel contact resonance atomic force microscopy (CR-AFM) method utilizing a two-dimensional Kirchhoff-Love plate framework is presented. Theoretical formulations are discussed, and the classic CR-AFM problem is re-cast into an easily implementable generalized eigenvalue problem. An analysis is performed to determine the optimal placement of the sensing tip for plates of different aspect ratios. Finally, an experiment is conducted using the finite element method to numerically verify the proposed technique. By using a plate geometry for CR-AFM and optimizing the sensor tip location, we achieve a higher measurement sensitivity and modal density when compared with standard AFM cantilever geometries. A higher modal density allows CR-AFM measurement to be conducted using more information extracting eigenmodes in a given frequency bandwidth. Published by AIP Publishing.