Oxygen atom actinometry reinvestigated: Comparison with absolute measurements by resonance absorption at 130 nm
Oxygen atom actinometry reinvestigated: Comparison with absolute measurements by resonance absorption at 130 nm
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重新研究氧原子光度测定法：与 130 nm 共振吸收绝对测量值的比较
DOI：
10.1063/1.347395
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发表时间：
1991
影响因子：
3.2
通讯作者：
N. Sadeghi
中科院分区：
文献类型：
--
作者：
J. Booth;O. Joubert;J. Pelletier;N. Sadeghi
使用130 nm处的共振吸收测量含O2的分布式电子回旋共振等离子体中的绝对氧原子浓度。在纯O2等离子体（1-6 mTorr）中的解离分数[O]/[O2]在0.01-0.06的范围内，但通过添加SF6、N2或Kr而显著增加。在2 mTorr的总压力下，观察到添加10%SF6时的最大[O]/[O2]为0.3。结果进行了比较，通过光发射辐射测量。量I 0（844 nm）/IAr（750 nm）（加入0.1 mTorr Ar）与[O]的相关性较差，但与[O2]的相关性良好。这表明，当解离分数小于0.1时，解离激发O2+e→O*（3 p3 P）+O是产生844 nm发射的最重要机制。
Resonance absorption at 130 nm was used to measure absolute oxygen atom concentrations in O2‐containing distributed electron cyclotron resonance plasmas. The dissociation fraction [O]/[O2] in pure O2 plasmas (1–6 mTorr) was in the range 0.01–0.06, but was significantly increased by the addition of SF6, N2 or Kr. At 2 mTorr total pressure a maximum [O]/[O2] of 0.3 was observed for 10% SF6 added. The results were compared to those obtained by optical emission actinometry measurements. The quantity I0 (844 nm)/IAr (750 nm) (with 0.1 mTorr Ar added) was poorly correlated with [O] but well correlated with [O2]. This suggests that, for dissociation fractions lower than 0.1, dissociative excitation, O2+e→O*(3p 3P)+O, is the most important mechanism for the production of 844 nm emission.