Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching
Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching
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DOI：
10.1039/c5ra26816h
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发表时间：
2016-01-01
期刊：
影响因子：
3.9
通讯作者：
Pacholski, C.
中科院分区：
文献类型：
--
作者：
Balderas-Valadez, R. F.;Agarwal, V.;Pacholski, C.
采用金属辅助化学腐蚀法制备了多孔硅光学生物传感器。由此获得双层多孔硅结构，其由在具有较小孔的多孔硅层顶部上的具有大孔的多孔柱组成。这些结构表现出类似的感测性能相比，电化学生产的多孔硅干涉传感器。
Optical biosensors based on porous silicon were fabricated by metal assisted chemical etching. Thereby double layered porous silicon structures were obtained consisting of porous pillars with large pores on top of a porous silicon layer with smaller pores. These structures showed a similar sensing performance in comparison to electrochemically produced porous silicon interferometric sensors.