Electrical and optical properties of hydrogenated amorphous carbon films
Electrical and optical properties of hydrogenated amorphous carbon films
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氢化非晶碳薄膜的电学和光学性能
DOI：
10.1016/0022-3093(80)90633-x
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发表时间：
1980
影响因子：
3.5
通讯作者：
F. Smith
中科院分区：
文献类型：
--
作者：
B. Meyerson;F. Smith
本文测量了一系列由乙炔（C_2H_2）直流辉光放电分解制备的氢化非晶碳（a-C：H）薄膜的电导率（25 ~ 350 ℃）和光吸收（1.65 ~ 4 eV）。电导率不是简单地激活的，并且对于所研究的样品变化超过11个数量级。从光学吸收数据推断的光学能隙位于0.9和2.1eV之间，随着Td的增加而减小。从这些测量可以推断，对于Td大于约425 ℃，膜在其电学和光学性质上将是“石墨的”。
We have measured the electrical conductivity (25 to 350C) and optical absorption (1.65 to 4 eV) of a series of hydrogenated amorphous carbon (a-C:H) films prepared via dc glow discharge decomposition of acetylene (C2H2) at deposition temperatures Tdbetween 25 and 375C. The electrical conductivity is not simply activated, and varies by over 11 orders of magnitude for the samples studied. Optical energy gaps inferred from optical absorption data lie between 0.9 and 2.1eV, decreasing with increasing Td. It can be inferred from these measurements that the films will be “graphitic” in their electrical and optical properties for Tdgreater than about 425C.