Collisional sheath dynamics in the intermediate radio-frequency regime
Collisional sheath dynamics in the intermediate radio-frequency regime
复制标题
中射频范围内的碰撞鞘动力学
DOI：
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发表时间：
2004
期刊：
影响因子：
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通讯作者：
F. Waelbroeck
中科院分区：
文献类型：
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作者：
N. Xiang;F. Waelbroeck
当射频频率ω等于或大于体等离子体的离子等离子体频率ωpi时，鞘层中离子的碰撞性是显著的，提出了鞘层模型。在这种情况下，离子动量方程可以很容易地求解。我们发现，鞘层中的离子速度随时间而变化，由此产生的离子能量分布是双峰的，即使射频是远远大于鞘层中的离子等离子体频率。模型的结果与流体方程的数值解进行了比较。两者都非常一致。
A sheath model is proposed for the case when the radio-frequency ω is comparable to or larger than the ion plasma frequency of the bulk plasma ωpi and the ion collisionality in the sheath is significant. In this case, the ion momentum equation can be solved easily. We find that the ion velocity in the sheath varies with time and the resulting ion energy distribution is bimodal even though the radio frequency is much larger than the ion plasma frequency in the sheath. The results of the model are compared with the numerical solutions of the fluid equations. Both are in very good agreement.