Two modified coherent gradient sensing methods for slope measurement of reflective surfaces
Two modified coherent gradient sensing methods for slope measurement of reflective surfaces
复制标题
两种改进的相干梯度传感方法用于反射表面的斜率测量
DOI：
10.1088/0957-0233/25/12/125202
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发表时间：
2014-11
影响因子：
2.4
通讯作者：
Zhu Jianguo
中科院分区：
文献类型：
--
作者：
Ma Kang;Xie Huimin;Zhu Jianguo
本文提出了两种测量反射面斜率的新方法，即基于相移的相干梯度传感：理论推导了三步和四步相移方法，并通过三步或四步干涉图精确计算出全场相位值。实验结果表明，两种方法测量的曲率相对误差均小于5%。这些成功的结果验证了这些方法的可行性，并且它们都具有很好的潜力用于测量薄膜/衬底系统的斜率，曲率和形状。
In this work, we propose two novel methods for the measurement of the slope of reflective surfaces, namely phase-shift based coherent gradient sensing: both a three-step and four-step phase shifting method are deduced theoretically and the full-field phase value can be calculated accurately by three or four inteferograms. Using these two methods, the automatic process of the fringes can be realized and the experimental results show that the relative errors of the curvature measurement with both methods are less than 5%. These successful results verify the feasibility of these methods, and both have a good potential to be utilized for measuring the slope, curvature, and shape of a thin film/substrate system.
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